Publications

2025

Intelligent Proximity Correction Enabled Large-Area Metasurfaces by KrF Photolithography
H.-L. Liu, S.-H. Su, P.-K. Chang, Y.-C. Chang, Y.-W. Huang, C.-W. Chang, T.-M. Huang, C.-C. Chen, W.-H. Huang, J.-M. Shieh, and P. Yu
IEEE Access, doi: 10.1109/ACCESS.2025.3631947
Reducing M3D effects in EUV masks by balancing diffraction orders
PK Chang, PH Fang, LF Chen, YL Chen, P Yu
Optical and EUV Nanolithography XXXVIII, PC134240N
Large area metalens and AR waveguides fabricated by DUV KrF lithography via intelligent proximity correction (IPC)
H Liu, P Chang, PH Fang, SH Su, P Yu
Metrology, Inspection, and Process Control XXXIX 13426, 1342644
Practical inverse mask synthesis via data-efficient physics-informed neural networks (PINN) model
KH Wang, PH Fang, P Yu
DTCO and Computational Patterning IV 13425, 390-396
Quasi phase-only mask (POM) for high contrast EUV imaging
PH Fang, P Chang, LF Chen, YL Chen, P Yu
Optical and EUV Nanolithography XXXVIII 13424, 513-520
Reducing eye glow in augmented reality waveguide through topological metagrating design
YC Chang, CE Lin, YC Huang, WT Liang, HL Liu, P Yu, CW Weng, CC Hu
Optical Architectures for Displays and Sensing in Augmented, Virtual, and ...
Metalens integrated Maxwellian view display for augmented reality glasses
WT Liang, IH Chuang, H Liu, YC Huang, YC Chang, P Yu
Optical Architectures for Displays and Sensing in Augmented, Virtual, and ...

2024

A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks with Customized Attention
CH Huang, HC Tung, YW Feng, HT Hsu, HL Liu, A Lin, P Yu
IEEE Access
Metasurface Design, Fabrication, and Applications
P Yu, YW Huang, YC Chang
2024 33rd Wireless and Optical Communications Conference (WOCC), 152-153
75‐4: Late‐News Paper: Metalens‐Integrated Augmented Reality (AR) Waveguides for Eye‐tracking: A Proof of Concept
IH Chuang, P Yu, CW Weng, CC Hu
SID Symposium Digest of Technical Papers 55 (1), 1038-1040
P‐227: Late‐News Poster: Design Freeform Metagratings for Eye‐glow Attenuation in Diffractive AR Waveguides
CE Lin, CW Weng, CC Hu, P Yu
SID Symposium Digest of Technical Papers 55 (1), 1567-1569
Integrated Pressure and Proximity Sensors on Silicone and PU Substrates That Supports Flexible Hybrid Electronics
PP Pancham, A Mukherjee, BL Yuan, CH Tsai, P Yu, CY Lo
IEEE Journal on Flexible Electronics 3 (6), 259-265
Tackling data inconsistency and runtime issues in inverse lithography technology (ILT) with comparative convergence study
PH Fang, P Yu
DTCO and Computational Patterning III 12954, 420-427
Enhancing CD-SEM accuracy with attention-boosted Noise2Noise model
Y Okada, H Liu, CE Lee, CH Tien, P Yu
Metrology, Inspection, and Process Control XXXVIII 12955, 598-605
Inverse reticle optimization with quantum annealing and hybrid solvers
PH Fang, YS Chen, JS Wu, P Yu
IEEE Access 12, 33069-33078

2023

Metadiffuser fabricated by DUV KrF 248nm photolithography for wavefront manipulation
H Liu, C Chou, L Huang, W Guo, P Yu, C Huang, C Cheng
Metamaterials, Metadevices, and Metasystems 2023 12646, 37-44
Intelligent reticle modification enabled large-area metalens patterning
C Chou, H Liu, L Huang, W Guo, P Yu, Y Chang, Y Huang, J Shieh
Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX ...
Investigation on attention-based convolutional architectures applied to optical proximity corrections
A Lin, HC Tung, YW Feng, P Yu
Emerging Topics in Artificial Intelligence (ETAI) 2023, PC126550M
Functional composite silicone made by roll-to-roll manufacturing for sensing applications and circular economy
PP Pancham, A Mukherjee, BL Yuan, P Yu, G Ahmad, S Mallik, CY Lo
2023 IEEE International Flexible Electronics Technology Conference (IFETC), 1-3
Thermal and photochemical stability studies of color-converted microLED microdisplay panels
AMN Elahi, Z Pei, P Yu, J Xu
IEEE Photonics Journal 15 (3), 1-6
Novel graphene transfer method to silicone and its sensing application on porous PDMS
PP Pancham, A Mukherjee, BL Yuan, P Yu, WH Chiu, G Ahmad, S Mallik, ...
IEEE Sensors Letters 7 (5), 1-4
Metasurfaces on silicon photonic waveguides for simultaneous emission phase and amplitude control
PY Hsieh, SL Fang, YS Lin, WH Huang, JM Shieh, P Yu, YC Chang
Optics Express 31 (8), 12487-12496

Earlier Publications

Optical proximity correction using machine learning assisted human decision
A Lin, T Rawat, CY Chang, HC Tung, HL Liu, P Yu
IEEE Photonics Journal 15 (1), 1-9 (2022)
Integrated metasurfaces on silicon photonics for emission shaping and holographic projection
PY Hsieh, SL Fang, YS Lin, WH Huang, JM Shieh, P Yu, YC Chang
Nanophotonics 11 (21), 4687-4695 (2022)
High-efficiency photolithographic NIR metalenses enabled by optical proximity correction with a neural-network lithographic model
HL Liu, WP Liao, YT Chen, SS Su, JM Shieh, P Yu, YC Chang
Metamaterials, Metadevices, and Metasystems 2022, PC1219521
Distributed optical proximity correction with deep-learning lithographic model for i-line photolithography
WP Liao, YF Lin, HL Liu, SD Gong, P Yu, YC Chang, JM Shieh, CC Chen, ...
Emerging Topics in Artificial Intelligence (ETAI) 2021 11804, 1180421